Optimization of a new microbolometer IR detector in standard CMOS technology

Nasimeh MORADİ; Zahra KHADEM; Ahmad AFİFİ

Makale detayları

Optimization of a new microbolometer IR detector in standard CMOS technology

Yazarlar:

Nasimeh MORADİ | Zahra KHADEM | Ahmad AFİFİ

Yayıncı:

Sivas Cumhuriyet Üniversitesi

Dergi:

Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi 2015 Vol.36 Issue 3, pp.1567-1571

Belge Tipi:

Makale

Yayın Tarihi:

5/2015

Belge Dili:

Türkçe

Document ID (Org No.):

2000921499

Sıklık:

Üç Aylık

eISSN:

2587-246X

pISSN:

2587-2680

Özet:

 


Abstract. This paper reports a new microbolometer structure with the CMOS n-well layer as the active element and the metal layer as intermediate layer on supporting arms. Due to thermal flux into the microbolometer, thermal variation occurs within it that leads to the variation of resistivity. The more thermal variation, the more microbolometer performance. Various materials have been used for fabrication of bolometers that one could outperforms the performance of bolometers by selecting an appropriate materials for active and intermediate layers on supporting arm. Detailed thermal simulations in ANSYS were performed to obtain an optimized structure. Maximum specific detectivity has been calculated 1334×109 cmHz1/2/W with a responsivity of 32721 V/W.

.

Makale detayları

Optimization of a new microbolometer IR detector in standard CMOS technology

Yazarlar: Nasimeh MORADİ | Zahra KHADEM | Ahmad AFİFİ

Yayıncı: Sivas Cumhuriyet Üniversitesi

Dergi: Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi 2015 Vol.36 Issue 3, pp.1567-1571

Belge Tipi: Makale

Yayın Tarihi: 5/2015

Belge Dili: Türkçe

Document ID (Org No.): 2000921499

Sıklık: Üç Aylık

eISSN: 2587-246X

pISSN: 2587-2680

Sayı

Yazarlar:

Nasimeh MORADİ | Zahra KHADEM | Ahmad AFİFİ

Yayıncı:

Sivas Cumhuriyet Üniversitesi

Dergi:

Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi 2015 Vol.36 Issue 3, pp.1567-1571

Belge Tipi:

Makale

Yayın Tarihi:

5/2015

Belge Dili:

Türkçe

Document ID (Org No.):

2000921499

Sıklık:

Üç Aylık

eISSN:

2587-246X

pISSN:

2587-2680