THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS

Ahmet Durmaz; Şekip Esat Hayber; Umut Aydemir

Makale detayları

THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS

Yazarlar:

Ahmet Durmaz | Şekip Esat Hayber | Umut Aydemir

Yayıncı:

Bursa Uludağ University

Ana Başlıklar:

Elektrik Mühendisliği

Dergi:

Uludağ Üniversitesi Mühendislik Fakültesi Dergisi Vol.28 Issue 1, pp.177-192

Belge Tipi:

Makale

Yayın Tarihi:

4/2023

Belge Dili:

İngilizce

Document ID (Org No.):

2001287410

pISSN:

2148-4155

Anahtar kelimeler:

Özet:

 In this study, the effects of mesa dimensions on sensor response in diaphragm-based FabryPerot fiber optic sensors FOSs were investigated in detail. Mesa diaphragms, also called centerembossed diaphragms, have been discussed sufficiently in the literature, but the effect of mesa thickness on sensor performance has not been discussed in detail. Moreover, there is no precise analytical solution for such diaphragms. For this reason, diaphragms with different thicknesses and radii were selected, and the deflection and frequency responses of the diaphragm according to the applied acoustic pressure were analyzed using the ANSYS software, depending on whether the mesa is thinner or thicker than the diaphragm. If the thickness of the mesa is smaller than the thickness of the diaphragm, the center deflection changes drastically. However, if the thickness of the mesa is two times greater than the thickness of the diaphragm, there is no significant change in the deflection results. Similarly, if the mesa thickness is thinner than the diaphragm, the sensors frequency response changes drastically with increasing mesa radius. In cases where the mesa thickness is larger than the diaphragm thickness, the frequency response changes less. According to the results, mesa dimensions should be considered when designing a mesa diaphragm-based Fabry-Perot FOS.

 In this study, the effects of mesa dimensions on sensor response in diaphragm-based FabryPerot fiber optic sensors FOSs were investigated in detail. Mesa diaphragms, also called centerembossed diaphragms, have been discussed sufficiently in the literature, but the effect of mesa thickness on sensor performance has not been discussed in detail. Moreover, there is no precise analytical solution for such diaphragms. For this reason, diaphragms with different thicknesses and radii were selected, and the deflection and frequency responses of the diaphragm according to the applied acoustic pressure were analyzed using the ANSYS software, depending on whether the mesa is thinner or thicker than the diaphragm. If the thickness of the mesa is smaller than the thickness of the diaphragm, the center deflection changes drastically. However, if the thickness of the mesa is two times greater than the thickness of the diaphragm, there is no significant change in the deflection results. Similarly, if the mesa thickness is thinner than the diaphragm, the sensors frequency response changes drastically with increasing mesa radius. In cases where the mesa thickness is larger than the diaphragm thickness, the frequency response changes less. According to the results, mesa dimensions should be considered when designing a mesa diaphragm-based Fabry-Perot FOS.

 In this study, the effects of mesa dimensions on sensor response in diaphragm-based FabryPerot fiber optic sensors FOSs were investigated in detail. Mesa diaphragms, also called centerembossed diaphragms, have been discussed sufficiently in the literature, but the effect of mesa thickness on sensor performance has not been discussed in detail. Moreover, there is no precise analytical solution for such diaphragms. For this reason, diaphragms with different thicknesses and radii were selected, and the deflection and frequency responses of the diaphragm according to the applied acoustic pressure were analyzed using the ANSYS software, depending on whether the mesa is thinner or thicker than the diaphragm. If the thickness of the mesa is smaller than the thickness of the diaphragm, the center deflection changes drastically. However, if the thickness of the mesa is two times greater than the thickness of the diaphragm, there is no significant change in the deflection results. Similarly, if the mesa thickness is thinner than the diaphragm, the sensors frequency response changes drastically with increasing mesa radius. In cases where the mesa thickness is larger than the diaphragm thickness, the frequency response changes less. According to the results, mesa dimensions should be considered when designing a mesa diaphragm-based Fabry-Perot FOS.

 Bu çalışmada diyafram tabanlı Fabry-Perot boşluklu fiber optik sensörlerde mesa boyutlarının sensör tepkisine etkileri detaylı olarak incelenmiştir. Literatürde ortası yükseltilmiş veya mesa olarak adlandırılan diyaframlar yeterince tartışılmış fakat mesa kalınlığının sensör performansına etkisi detaylı tartışılmamıştır. Bu tarz diyaframların kesin analitik çözümü ise bulunmamaktadır. Bu nedenle farklı kalınlık ve yarıçapa sahip diyaframlar seçilerek mesanın diyaframdan ince olması ve kalın olması durumlarına göre diyaframın, uygulanan akustik basınca göre esneme ve frekans tepkileri ANSYS programı kullanılarak analiz edilmiştir. Mesanın kalınlığı diyaframın kalınlığından küçük olması durumunda merkez esnemesi ciddi olarak değişmektedir. Ancak mesa kalınlığının diyaframın kalınlığından 2 kat büyük olması durumunda ise esneme sonuçlarında ciddi bir değişim olmamaktadır. Benzer şekilde mesa kalınlığının diyaframdan ince olması durumda sensörün frekans cevabı artan mesa yarıçapı ile ciddi olarak değişmektedir. Mesa kalınlığının diyafram kalınlığından daha büyük olduğu durumlarda ise frekans cevabı daha az değişmektedir. Elde edilen sonuçlara göre mesa diyafram tabanlı Fabry-Perot boşluklu fiber optik sensör tasarlanırken mesa boyutları dikkate alınmalıdır.

Makale detayları

THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS

Yazarlar:

Ahmet Durmaz | Şekip Esat Hayber | Umut Aydemir

Yayıncı:

Bursa Uludağ University

Ana Başlıklar:

Elektrik Mühendisliği

Dergi:

Uludağ Üniversitesi Mühendislik Fakültesi Dergisi Vol.28 Issue 1, pp.177-192

Belge Tipi:

Makale

Yayın Tarihi:

4/2023

Belge Dili:

İngilizce

Document ID (Org No.):

2001287410

pISSN:

2148-4155

Mesa Diaphragm

MEMS

Fabry-Perot Interferometer

Fiber Optic Sensors

Mesa Diyafram

MEMS

Fabry-Perot İnterferometresi

Fiber Optik Sensör

Sayı

Makale detayları

Yazarlar: Ahmet Durmaz | Şekip Esat Hayber | Umut Aydemir

Yayıncı: Bursa Uludağ University

Ana Başlıklar: Elektrik Mühendisliği

Dergi: Uludağ Üniversitesi Mühendislik Fakültesi Dergisi Vol.28 Issue 1, pp.177-192

Belge Tipi: Makale

Yayın Tarihi: 4/2023

Belge Dili: İngilizce

Document ID (Org No.): 2001287410

pISSN: 2148-4155

Sayı

Yazarlar:

Ahmet Durmaz | Şekip Esat Hayber | Umut Aydemir

Yayıncı:

Bursa Uludağ University

Ana Başlıklar:

Elektrik Mühendisliği

Dergi:

Uludağ Üniversitesi Mühendislik Fakültesi Dergisi Vol.28 Issue 1, pp.177-192

Belge Tipi:

Makale

Yayın Tarihi:

4/2023

Belge Dili:

İngilizce

Document ID (Org No.):

2001287410

pISSN:

2148-4155