Vacuum Cryostat's Pressure Dependent Dark Conductivity Measurements on a-Si:H and a-SiN:H Films

İlker AY; Hüseyin TOLUNAY

Makale detayları

Vacuum Cryostat's Pressure Dependent Dark Conductivity Measurements on a-Si:H and a-SiN:H Films

Yazarlar:

İlker AY | Hüseyin TOLUNAY

Yayıncı:

TUBITAK

Dergi:

Turkish Journal of Physics 2001 Vol.25 Issue 3, pp.265-270

Belge Tipi:

Makale

Yayın Tarihi:

2/2001

Belge Dili:

Türkçe

Document ID (Org No.):

2000762475

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101

Anahtar kelimeler:

A. Dark conductivity; B. Cryostat pressure; C.Surface effect

Özet:

 

The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature dependent dark  conductivity curves of annealed a-Si:H and a-SiN:H samples when the  temperatures were increased from 90 K to room temperature at a constant  heating rate.  To study the surface adsorption effect, vacuum cryostat  pressure dependence of these peaks are investigated.  We have also  studied the effect of nitrogen on these observed peaks in dark  conductivity.

 

The electrical properties of a-Si:( H ) and a- SiN ):( H ) films prepared by plasma deposition from SiH4+NH3 gas mixtures have been investigated. We observed anomalous peaks in the temperature dependent dark  conductivity curves of annealed a-Si:H and a-SiN:H samples when the  temperatures were increased from 90 K to room temperature at a constant  heating rate.  To study the surface adsorption effect, vacuum cryostat  pressure dependence of these peaks are investigated.  We have also  studied the effect of nitrogen on these observed peaks in dark  conductivity.

Makale detayları

Vacuum Cryostat's Pressure Dependent Dark Conductivity Measurements on a-Si:H and a-SiN:H Films

Yazarlar: İlker AY | Hüseyin TOLUNAY

Yayıncı: TUBITAK

Dergi: Turkish Journal of Physics 2001 Vol.25 Issue 3, pp.265-270

Belge Tipi: Makale

Yayın Tarihi: 2/2001

Belge Dili: Türkçe

Document ID (Org No.): 2000762475

Sıklık: İki Aylık

eISSN: 1303-6122

pISSN: 1300-0101

A. Dark conductivity; B. Cryostat pressure; C.Surface effect

Sayı

Yazarlar:

İlker AY | Hüseyin TOLUNAY

Yayıncı:

TUBITAK

Dergi:

Turkish Journal of Physics 2001 Vol.25 Issue 3, pp.265-270

Belge Tipi:

Makale

Yayın Tarihi:

2/2001

Belge Dili:

Türkçe

Document ID (Org No.):

2000762475

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101