MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY

Hidayet ÇETİN

Makale detayları

MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY

Yazarlar:

Hidayet ÇETİN

Yayıncı:

Fevzullah TEMURTAŞ

Dergi:

Electronic Letters on Science and Engineering 2016 Vol.12 Issue 2, pp.6-6

Belge Tipi:

Makale

Yayın Tarihi:

7/2016

Belge Dili:

Türkçe

Document ID (Org No.):

2000407284

pISSN:

1305-8614

Özet:

 

At the fabrication of Graphene Field Effect Transistor (GFET), microfabrication process
 has been extensively used. Microfabrication process has usually left impurities. However, impurities
 could be much more important at graphene-like two dimensional systems. In this work, pristine and
 photolithography-applied graphene samples were investigated by Surface Enhanced Raman
 Spectroscopy (SERS) which is a powerful method to detect molecules even if only one molecule [1-
 2]. Furthermore, after the photolithography process, to obtain more clean graphene surface, several
 methods were applied. The obtained electrical and SERS results were associated and compared to
 each other’s to propound a new lift-off solvents.

Makale detayları

MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY

Yazarlar: Hidayet ÇETİN

Yayıncı: Fevzullah TEMURTAŞ

Dergi: Electronic Letters on Science and Engineering 2016 Vol.12 Issue 2, pp.6-6

Belge Tipi: Makale

Yayın Tarihi: 7/2016

Belge Dili: Türkçe

Document ID (Org No.): 2000407284

pISSN: 1305-8614

Sayı

Yazarlar:

Hidayet ÇETİN

Yayıncı:

Fevzullah TEMURTAŞ

Dergi:

Electronic Letters on Science and Engineering 2016 Vol.12 Issue 2, pp.6-6

Belge Tipi:

Makale

Yayın Tarihi:

7/2016

Belge Dili:

Türkçe

Document ID (Org No.):

2000407284

pISSN:

1305-8614