Effects of annealing temperature on electrical characteristics of sputtered Al/Al 2 O 3 /p-Si (MOS) capacitors

Şenol KAYA; Erhan BUDAK; Ercan YILMAZ

Makale detayları

Effects of annealing temperature on electrical characteristics of sputtered Al/Al 2 O 3 /p-Si (MOS) capacitors

Yazarlar:

Şenol KAYA | Erhan BUDAK | Ercan YILMAZ

Yayıncı:

TUBITAK

Ana Başlıklar:

Uygulamalı fizik

Dergi:

Turkish Journal of Physics 2018 Vol.42 Issue 4, pp.470-477

Belge Tipi:

Makale

Yayın Tarihi:

8/2018

Belge Dili:

İngilizce

Document ID (Org No.):

2000759262

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101

Özet:

 


 
                         The aim of this study is to investigate annealing effects on the electrical characteristics of aluminum oxide (Al2O3) MOS capacitors. Chemical changes after annealing have been characterized using the Fourier transform infrared spectroscopy prior to detailed electrical investigation. The influence of annealing temperature on electrical characteristics has been investigated by capacitance-voltage (C-V) and conductance-voltage (G/ω-V) curves. Effective oxide trap density (Nox), border trap densities (N2bt), and interface trap densities (Nit) were calculated during the electrical analysis. Remarkable changes in the measurements were observed depending on the annealing temperatures. The obtained results demonstrate that the optimum annealing temperature is 450 °C for the Al2O3-based devices.

                    

.

Makale detayları

Effects of annealing temperature on electrical characteristics of sputtered Al/Al 2 O 3 /p-Si (MOS) capacitors

Yazarlar: Şenol KAYA | Erhan BUDAK | Ercan YILMAZ

Yayıncı: TUBITAK

Ana Başlıklar: Uygulamalı fizik

Dergi: Turkish Journal of Physics 2018 Vol.42 Issue 4, pp.470-477

Belge Tipi: Makale

Yayın Tarihi: 8/2018

Belge Dili: İngilizce

Document ID (Org No.): 2000759262

Sıklık: İki Aylık

eISSN: 1303-6122

pISSN: 1300-0101

Sayı

Yazarlar:

Şenol KAYA | Erhan BUDAK | Ercan YILMAZ

Yayıncı:

TUBITAK

Ana Başlıklar:

Uygulamalı fizik

Dergi:

Turkish Journal of Physics 2018 Vol.42 Issue 4, pp.470-477

Belge Tipi:

Makale

Yayın Tarihi:

8/2018

Belge Dili:

İngilizce

Document ID (Org No.):

2000759262

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101