Comparison of geometric and drive-induced nonlinearities in doubly clamped,  thermoelastic nanoelectromechanical systems

Mehmet Selim HANAY

Makale detayları

Comparison of geometric and drive-induced nonlinearities in doubly clamped, thermoelastic nanoelectromechanical systems

Yazarlar:

Mehmet Selim HANAY

Yayıncı:

TUBITAK

Dergi:

Turkish Journal of Physics 2019 Vol.43 Issue 3, pp.264-271

Belge Tipi:

Makale

Yayın Tarihi:

5/2019

Belge Dili:

Türkçe

Document ID (Org No.):

2000759018

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101

Özet:

 

The performance of resonant sensors based on nanoelectromechanical systems depends critically on the  maximum amplitude of oscillation reached in the linear regime. The maximum linear amplitude is determined by  nonlinear mechanisms that can originate from the material, geometric and transduction mechanism related factors. Here  we compare the two competing effects, the geometric and drive-induced nonlinearities, for a commonly used device family,  the thermoelastically driven, doubly clamped beams. We find that the geometric nonlinearity dominates for most of the  device designs used in the literature, however the drive-induced nonlinearity becomes the determining factor for thicker  beams with small electrode lengths.

Makale detayları

Comparison of geometric and drive-induced nonlinearities in doubly clamped, thermoelastic nanoelectromechanical systems

Yazarlar: Mehmet Selim HANAY

Yayıncı: TUBITAK

Dergi: Turkish Journal of Physics 2019 Vol.43 Issue 3, pp.264-271

Belge Tipi: Makale

Yayın Tarihi: 5/2019

Belge Dili: Türkçe

Document ID (Org No.): 2000759018

Sıklık: İki Aylık

eISSN: 1303-6122

pISSN: 1300-0101

Sayı

Yazarlar:

Mehmet Selim HANAY

Yayıncı:

TUBITAK

Dergi:

Turkish Journal of Physics 2019 Vol.43 Issue 3, pp.264-271

Belge Tipi:

Makale

Yayın Tarihi:

5/2019

Belge Dili:

Türkçe

Document ID (Org No.):

2000759018

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101