Optical Transmission Measurements on Glow-Discharge Amorphous Silicon Nitride Films

İlker Ay And Huseyin TOLUNAY

Makale detayları

Optical Transmission Measurements on Glow-Discharge Amorphous Silicon Nitride Films

Yazarlar:

İlker Ay And Huseyin TOLUNAY

Yayıncı:

TUBITAK

Dergi:

Turkish Journal of Physics 2001 Vol.25 Issue 3, pp.215-222

Belge Tipi:

Makale

Yayın Tarihi:

2/2001

Belge Dili:

Türkçe

Document ID (Org No.):

2000762453

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101

Anahtar kelimeler:

A. Optical transmission; B. Refractive index; C. Swanepoel method D. Hydrogenated amorphous silicon nitride

Özet:

 

Hydrogenated amorphous silicon nitride films have been prepared by   the  glow-discharge decomposition of ammonia/silane gas mixture. From optical   transmission measurements in the wavelength range from 400 nm to 1100 nm   refractive indices absorption coefficients and optical Tauc gaps of the films have been obtained. A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.

 

Hydrogenated amorphous silicon nitride films have been prepared by   the  glow-discharge decomposition of ammonia/silane gas mixture. From optical   transmission measurements in the wavelength range from 400 nm to 1100 nm   refractive indices absorption coefficients and optical Tauc gaps of the films have been obtained. A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.

Makale detayları

Optical Transmission Measurements on Glow-Discharge Amorphous Silicon Nitride Films

Yazarlar: İlker Ay And Huseyin TOLUNAY

Yayıncı: TUBITAK

Dergi: Turkish Journal of Physics 2001 Vol.25 Issue 3, pp.215-222

Belge Tipi: Makale

Yayın Tarihi: 2/2001

Belge Dili: Türkçe

Document ID (Org No.): 2000762453

Sıklık: İki Aylık

eISSN: 1303-6122

pISSN: 1300-0101

A. Optical transmission; B. Refractive index; C. Swanepoel method D. Hydrogenated amorphous silicon nitride

Sayı

Yazarlar:

İlker Ay And Huseyin TOLUNAY

Yayıncı:

TUBITAK

Dergi:

Turkish Journal of Physics 2001 Vol.25 Issue 3, pp.215-222

Belge Tipi:

Makale

Yayın Tarihi:

2/2001

Belge Dili:

Türkçe

Document ID (Org No.):

2000762453

Sıklık:

İki Aylık

eISSN:

1303-6122

pISSN:

1300-0101