Alttaş sıcaklığının expanding thermal plazma yöntemi ile elde edilen a-Si:H filmlerin optik ve elektriksel özellikleri üzerine etkisi

Tayyar GÜNGÖR; Guy J. ADRIAENSSENS

Makale detayları

Alttaş sıcaklığının expanding thermal plazma yöntemi ile elde edilen a-Si:H filmlerin optik ve elektriksel özellikleri üzerine etkisi

Yazarlar:

Tayyar GÜNGÖR | Guy J. ADRIAENSSENS

Yayıncı:

Burdur Mehmet Akif Ersoy University

Dergi:

The Journal of Graduate School of Natural and Applied Sciences of Mehmet Akif Ersoy University 2011 Vol.2 Issue 1, pp.40-49

Belge Tipi:

Makale

Yayın Tarihi:

5/2011

Belge Dili:

Türkçe

Document ID (Org No.):

2000550384

Sıklık:

İki Yıllık

eISSN:

1309-2243

Özet:

 

Optical properties and dark current activation energy of hydrogenated amorphous silicon (a,Si:H)  produced  by  the  expanding  thermal  plasma  chemical  vapour  deposition  (ETPCVD)  technique  are  investigated as a function of substrate temperature in the 150,500°C temperature range. The optical  transmission spectra were used to obtain the thickness, refractive index, and optical band gap of the a, Si:H films. It is observed that while the refractive index is increasing with substrate temperature, the  optical  band  gap  and  deposition  rate,  as  well  as  the  dark  conductivity  activation  energy,  are  decreasing.

 

Optical properties and dark current activation energy of hydrogenated amorphous silicon (a,Si:H)  produced  by  the  expanding  thermal  plasma  chemical  vapour  deposition  (ETPCVD)  technique  are  investigated as a function of substrate temperature in the 150,500°C temperature range. The optical  transmission spectra were used to obtain the thickness, refractive index, and optical band gap of the a, Si:H films. It is observed that while the refractive index is increasing with substrate temperature, the  optical  band  gap  and  deposition  rate,  as  well  as  the  dark  conductivity  activation  energy,  are  decreasing.

Makale detayları

Alttaş sıcaklığının expanding thermal plazma yöntemi ile elde edilen a-Si:H filmlerin optik ve elektriksel özellikleri üzerine etkisi

Yazarlar: Tayyar GÜNGÖR | Guy J. ADRIAENSSENS

Yayıncı: Burdur Mehmet Akif Ersoy University

Dergi: The Journal of Graduate School of Natural and Applied Sciences of Mehmet Akif Ersoy University 2011 Vol.2 Issue 1, pp.40-49

Belge Tipi: Makale

Yayın Tarihi: 5/2011

Belge Dili: Türkçe

Document ID (Org No.): 2000550384

Sıklık: İki Yıllık

eISSN: 1309-2243

Sayı

Yazarlar:

Tayyar GÜNGÖR | Guy J. ADRIAENSSENS

Yayıncı:

Burdur Mehmet Akif Ersoy University

Dergi:

The Journal of Graduate School of Natural and Applied Sciences of Mehmet Akif Ersoy University 2011 Vol.2 Issue 1, pp.40-49

Belge Tipi:

Makale

Yayın Tarihi:

5/2011

Belge Dili:

Türkçe

Document ID (Org No.):

2000550384

Sıklık:

İki Yıllık

eISSN:

1309-2243